Sputtering Codeposition and Metal-Induced Crystallization to Enhance the Power Factor of Nanocrystalline Silicon
Authors: Andres Conca, Elías Ferreiro-Vila, Alfonso Cebollada, and Marisol Martin-Gonzalez Article. ACS Appl. Electron. Mater. Date: April. 2023. Doi: doi.org/10.1021/acsaelm.2c01772 Abstract: The power factor of highly boron-doped nanocrystalline Si thin films with controlled doping concentration is investigated. We achieve a high degree of tuning of boron content with a charge carrier concentration from 1018 to 1021/cm3 and